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1

The Role of High Temperature Treatments in Stress Release and Defect Reduction

Mica, Isabella, Polignano, Maria Luisa, Bonera, Emiliano, Carnevale, Gian Pietro, Magni, P.

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 286 KB

english, 2008

2

Dark Current Spectroscopy of Transition Metals in CMOS Image Sensors

Russo, Felice, Nardone, Giancarlo, Polignano, Maria Luisa, D'Ercole, Angelo, Pennella, Fabrizio, Felice, Massimo Di, Monte, Andrea Del, Matarazzo, Antonio, Moccia, Giuseppe, Polsinelli, Gianpaolo, D'A

Journal:

ECS Journal of Solid State Science and Technology

Year:

2017

Language:

english

File:

PDF, 1.17 MB

english, 2017

3

Electrical fingerprint of pipeline defects

Isabella Mica, Maria Luisa Polignano, Cinzia De Marco

Journal:

Materials Science and Engineering: B

Year:

2004

Language:

english

File:

PDF, 95 KB

english, 2004

4

Defect generation by argon implantation: microscopy characterization and electrical properties

Isabella Mica, Maria Luisa Polignano, Davide Codegoni, Aurelio Mauri, Valter Soncini

Journal:

physica status solidi (c)

Year:

2012

Language:

english

File:

PDF, 330 KB

english, 2012

5

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Revealing Copper Contamination in Silicon after Low Temperature Treatments

Polignano, Maria Luisa, Brivio, Jacopo, Codegoni, Davide, Grasso, Salvatore, Altmann, Roswitha, Nutsch, Andreas, Pavia, Giuseppe

Year:

2009

Language:

english

File:

PDF, 966 KB

english, 2009

6

Molybdenum Contamination in Silicon: Detection and Impact on Device Performances

Codegoni, Davide, Polignano, Maria Luisa, Caputo, Daniele, Riva, Andrea, Blot, Emmanuel, Coulon, David, Maillot, Philippe, Pic, Nicolas

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 592 KB

english, 2009

7

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Comparability of TXRF Systems at Different Laboratories

Nutsch, Andreas, Beckhoff, Burkhard, Altmann, Roswitha, Polignano, Maria Luisa, Cazzini, Elena, Codegoni, Davide, Borionetti, Gabriella, Kolbe, Michael, Mueller, Matthias, Mantler, Claus, Streli, Chri

Year:

2009

Language:

english

File:

PDF, 222 KB

english, 2009

8

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Mechanical Stress and Defect Formation in Device Processing

Polignano, Maria Luisa, Carnevale, Gianpietro, Fantini, Paolo, Mica, Isabella

Year:

2006

Language:

english

File:

PDF, 266 KB

english, 2006

9

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Assessing Various Analytical Techniques with Different Lateral Resolution by Investigating Spin-coated Inorganic Contamination on Si Wafer Surfaces

Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvatore, Cazzini, Elena, Bersani, Massimo, Gennaro, Salvat

Year:

2009

Language:

english

File:

PDF, 998 KB

english, 2009

10

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Niobium Contamination in Silicon

Polignano, Maria Luisa, Codegoni, Davide, Borionetti, Gabriella, Bonoli, Francesco, Brivio, Jacopo, Greco, Stefano, Marino, Antonio, Monge, Paolo, Patoprsta, Ivana, Privitera, Vittorio, Riva, Caterina

Year:

2010

Language:

english

File:

PDF, 486 KB

english, 2010

11

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Improved TEM Sample Preparation by Low Energy FIB for Strain Analysis by Convergent Beam Electron Diffraction

Balboni, Roberto, Borionetti, Gabriella, Moiraghi, Luigi, Vaccari, Giuseppe, Polignano, Maria Luisa, Carnevale, Gian Pietro, Cazzaniga, Francesco, Mica, Isabella, Sammiceli, Francesca

Year:

2009

Language:

english

File:

PDF, 750 KB

english, 2009

12

Highly Sensitive Detection of Inorganic Contamination

Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, G., Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvo, Cazzini, Elena, Bersani, M., Lazzeri, P., Gennaro, S., Kolbe

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 344 KB

english, 2009

13

Analysis of Non-Uniform Contamination Profiles by Lifetime Data

Polignano, Maria Luisa, Caputo, Domenico, Pavia, G., Zanderigo, F.

Journal:

Solid State Phenomena

Year:

1998

File:

PDF, 649 KB

1998

14

Influence of Cobalt Contamination in the Measurement of Diffusion Length of Silicon Wafers

Pic, Nicolas, Danel, Adrien, Polignano, Maria Luisa, Salvà, Gianluca, Sardo, Massimo, Rey, Stéphane

Journal:

Solid State Phenomena

Year:

2004

Language:

english

File:

PDF, 287 KB

english, 2004

15

Chromium Contamination in Silicon: Detection and Impact on Oxide Performances

Polignano, Maria Luisa, Caputo, Daniele, Cerutti, F., Cottini, M., Farini, L., Reffle, J.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 447 KB

english, 2005

16

Dislocation Generation in Device Fabrication Process

Mica, Isabella, Polignano, Maria Luisa, Carnevale, G.P., Armigliato, A., Balboni, R., Brambilla, M., Cazzaniga, F., Pavia, G., Soncini, V.

Journal:

Solid State Phenomena

Year:

2004

Language:

english

File:

PDF, 315 KB

english, 2004

17

Cobalt Contamination in Silicon

Polignano, Maria Luisa, Caputo, Daniele, Codegoni, Davide, Privitera, Vittorio, Riva, M.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 548 KB

english, 2005

18

The Role of the Interstitial Oxygen in the Recovery and Evolution of the Boron Implantation Damage

Mica, Isabella, Polignano, Maria Luisa, Cazzaniga, F., Di Piazza, L., Mariani, M., Ricci, E., Sammiceli, F., Speranza, S.

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 1.32 MB

english, 2009

19

Proximity Gettering of Slow Diffuser Contaminants

Polignano, Maria Luisa, Mica, Isabella, Cazzini, Elena, Ceresoli, Monica, Codegoni, Davide, Russo, Felice, Moccia, Giuseppe, Nardone, Giancarlo, Alfonsetti, Roberto, Polsinelli, Giampaolo, D'Angelo, A

Journal:

Solid State Phenomena

Year:

2013

Language:

english

File:

PDF, 548 KB

english, 2013

20

EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon

Spiga, S., Castaldini, Antonio, Cavallini, Anna, Polignano, Maria Luisa, Cazzaniga, F.

Journal:

Solid State Phenomena

Year:

1998

Language:

english

File:

PDF, 633 KB

english, 1998

21

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Nickel Contamination in Silicon: Electrical Activity Study and Microscopy Analysis

Polignano, Maria-Luisa, Codegoni, Davide, Grasso, Salvatore, Riva, Andrea, Sammiceli, Francesca, Caputo, Daniele, Privitera, Vittoria

Year:

2008

Language:

english

File:

PDF, 709 KB

english, 2008

22

Reference Samples for Ultra Trace Analysis of Organic Compounds on Substrate Surfaces

Nutsch, Andreas, Beckhoff, Burkhard, Borionetti, G., Codegoni, Davide, Grasso, S., Hönicke, Philipp, Leibold, Andreas, Müller, Matthias, Otto, Michael, Pfitzner, Lothar, Polignano, Maria Luisa

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 519 KB

english, 2012

23

[ECS Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) - Munich, Germany (September 13 - September 14, 2007)] ECS Transactions - Molybdenum Contamination in Indium and Boron Implantation Processes

Codegoni, Davide, Polignano, Maria Luisa, Soncini, Valter, Bresolin, Camillo

Year:

2007

Language:

english

File:

PDF, 427 KB

english, 2007

24

Analysis of Contaminated Oxide-Silicon Interfaces

Polignano, Maria Luisa, Codegoni, Davide, Castellano, Luca, Greco, Stefano, Borionetti, Gabriella, Bonoli, Francesco, Nutsch, Andreas, Altmann, Roswitha, Liebold, Andreas, Otto, Michael, Monge, Paolo,

Journal:

Solid State Phenomena

Year:

2011

Language:

english

File:

PDF, 347 KB

english, 2011

25

[IEEE ESSDERC 2015 - 45th European Solid-State Device Research Conference - Graz, Austria (2015.9.14-2015.9.18)] 2015 45th European Solid State Device Research Conference (ESSDERC) - H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks

Ghidini, Gabriella, Merlini, Daniele, Cannavo, Massimiliano, Polignano, Maria Luisa, Mica, Isabella, Galbiati, Amos, Zullino, Lucia, Turconi, Riccardo, Grasso, Salvatore, Moroni, Maurizio, Codegoni, D

Year:

2015

Language:

english

File:

PDF, 485 KB

english, 2015

26

[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Characterization Techniques for Ion-Implanted Layers in Silicon

Polignano, Maria Luisa, Codegoni, Davide, Galbiati, Amos, Grasso, Salvatore, Mica, Isabella, Basa, Peter, Pongracz, Anita, Kiss, Zoltan Tamas, Nadudvari, Gyorgy

Year:

2018

Language:

english

File:

PDF, 954 KB

english, 2018

27

Detection and Prevention of Palladium Contamination in Silicon Devices

Polignano, Maria Luisa, Mica, Isabella, Brambilla, Agostino, Brambilla, Claudio, Brambilla, Simona, Ceresoli, Monica, Codegoni, Davide, Farini, Laura, Somaini, Francesco

Journal:

Solid State Phenomena

Year:

2015

File:

PDF, 1.18 MB

2015